Nature | Nanotechnology
Follow
Scalable transfer for industrial 2D-CMOS manufacturing
Foundry-compatible transfer of two-dimensional materials is central to angstrom-era complementary FET logic, where atomically thin channels must be moved from growth wafers to target stacks without contamination, strain or interfacial damage. Scalable delamination, bonding and wafer-level metrology are needed to bridge lab-scale device performance with 300-mm CMOS manufacturing.